Spare Parts & Consumables

We purchase older, surplus, spare parts from large companies and maintain an inventory with intent to provide repair services with system warranties. Our stock includes Consumables and OEM replacement parts for KLA-Tencor-Prometrix metrology systems. We have everything from replacement Printed Circuit Board Assemblies, to hard to find Sensors and Switches. Our quality control ensures that all parts are tested and conform to OEM specifications. If you can't find what you're looking for, please contact us. We also provide competitive quotes for your overstocked, obsolete, extra parts, or idle equipment.

Select a category below to view the part listings.

Surfscan 45/5500 Parts
SFS-4500/5500 Parts

SurfScan 6xxx Parts
SFS-6XXX Parts

Alpha-Step 200/300 Parts
AS-200 / AS-300 Parts

P-X / P-XX Profiler Parts
P-X and P-XX Parts

Motors
Motors


SM200 / 300 Parts

RS Series Parts
RS-Series Parts

FT Series Parts
FT-Series Parts

Misc. Parts
Miscellaneous Parts

Wafer Chucks & Locators
Chucks & Locators

 

Payment

We accept Visa, Master Card, American Express, Money Order or Cashiers Check.

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Shipping

FedEx is our preferred carrier. We can ship International, but require YOU to provide a FedEx account#.
If you desire shipment outside U.S. Please contact us.

 

 
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