Tencor SFS-6xxx Spare Parts

We stock spare parts for Surfscan 6100 | 6200 | 6220 | 6400 | 6420 Wafer Inspection Systems. All Parts are subject to availability. Please contact us for additional information and pricing.

505161

 Blower Assembly 

 - Tencor PN: 505161
 - Works with Surfscan AIT 2           
 - Used & Tested -- Label

Manufacturer
Part#
Description
Works with
Condition
Warranty
Pic 1
Tencor
152285
PCB assy INSW Interface
SFS-6xxx
Used & Tested
180 Day
Tencor
291552
PCB assy CPU 486-DX2
SFS-6xxx
Used & Tested
180 Day
Tencor
173323
PCB assy Haze Separator
SFS-6xxx
Used & Tested
180 Day
Tencor
188859
PCB assy 4 Channel PWM Motor Drive
SFS-6xxx
Used & Tested
180 Day
Tencor
FL-192
Locator Plate 200mm Empak 9200
SFS-6xxx
Used & Tested
180 Day
Tencor
204587
Scanner Mirror Assy
SFS-6xxx
Used & Tested
180 Day
Tencor
217298
Micro Switch Assy Indexer
SFS-6xxx
Used & Tested
180 Day
Tencor
162744
Field Mirror
SFS-6200
Used & Tested
180 Day
Tencor
163996
PCB Assy, Motor Distribution Board 
SFS-6200
Used & Tested
180 Day
Tencor
174718
Ceramic Timing Pins for SFS-62XX - Sold as set of 3
SFS-62XX
Used & Tested
180 Day
Tencor
290840
PC Board Assy, Analog Board - Sold Out
SFS-6420
Used & Tested
180 Day
Tencor
153818
PC Board Assy, GPIO - Out of Stock
SFS-6200
Used & Tested
180 Day
Tencor
345253
PCB Assy, Timing Generator - Out of Stock
SFS-62XX
Used & Tested
180 Day
Tencor
277266
PCB Assy, Timing Generator - Out of Stock
SFS-6420
Used & Tested
180 Day
Tencor
502510
PCB Assy, Analog Board - Sold Out
SFS-6220
Used & Tested
180 Day
Tencor
164437
PCB Assy, Peak Processor - Out of Stock
SFS-6200
Used & Tested
180 Day
Tencor
238740
PCB Assy, GPIO - Out of Stock
SFS-6400
Used & Tested
180 Day
Tencor
365998
Argon Laser
SFS-6xxx
New
180 Day
Tencor
183245
Argon Laser Power Supply
SFS-6xxx
New
180 Day

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 


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