Systems Serviced
We provide support for KLA-Tencor-Prometrix systems.
Our service offerings are focused on:
- High resolution & standard surface profilers
- Wafer inspection equipment
- Resistivity measuring & mapping systems
Supported Models
- SurfScan Wafer Inspection Systems Series - 4500, 5000, 5500, 6100, 6200, 6220, 6400, 6420
- Tencor P-Series Profilers P-1, P-2, P-6, P-10, P-11, P-12,P-20, P-22
- Tencor Alpha-Step Series Profilers AS-200, AS-250, AS-300, AS-500
- Prometrix RS Series RS-35, RS-55, RS-75
- Prometrix FT Series FT-500, FT-600, FT-750 <-- Currenty providing parts only
Method of Support
A diagnosis and troubleshooting call is initiated by the customer. The level of involvement is determined by mutual agreement with the engineer and by the customer’s technical ability. If the engineer feels the problem may be diagnosed over the phone, they will spend whatever time is required. Running specialized diagnostic programs or analysis may be necessary. If the problem is localized to a board or module we can discuss sending out the parts for trial and diagnosis. If determined an on-site service appointment is needed, MES will provide a quote and schedule as soon as possible.
Response Time
The following discussion is based on our past performance and is an accurate guide to our future performance although it may vary based on current workload and availability of parts.
- Telephone assistance and diagnosis begins with the customer's call.
- If the system is not functional and a part is required, it is shipped over night the same day as the diagnosis.
- If field service is required it is generally scheduled and performed within three days based on prioroty.
- The customer’s situation is reviewed and generally a non-operational system has highest priority.
Service Contract
Service contracts are recommended for continued coverage after a system warranty expires. Please contact us to get on our schedule.